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Optical Engineering

Two-grating interferometer with sinusoidal phase modulation for surface profile measurement
Author(s): Yande Xu; Osami Sasaki; Takamasa Suzuki
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Paper Abstract

A two-grating interferometer for measurement of profiles of polished surfaces is proposed. The ±first-order beams diffracted by the first grating produce parallel fringes of about 50-µm spacing on an object surface. By using the second grating, we eliminate the parallel fringes and extract a phase distribution produced by the surface profile of the object. Moreover, the vibration of the second grating of a small size enables us to use the sinusoidal phase-modulating interferometry. Measurement resolution is higher than 0.3 µm at the equivalent wavelength of 35 µm.

Paper Details

Date Published: 1 April 2005
PDF: 6 pages
Opt. Eng. 44(4) 043601 doi: 10.1117/1.1883083
Published in: Optical Engineering Volume 44, Issue 4
Show Author Affiliations
Yande Xu, Niigata Univ. (Japan)
Osami Sasaki, Niigata Univ. (Japan)
Takamasa Suzuki, Niigata Univ. (Japan)

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