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Optical Engineering

Design and implementation of a vacuum-compatible laser-based subnanometer-resolution absolute distance measurement system
Author(s): Patrick P. Naulleau; Paul E. Denham; Senajith Rekawa
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Paper Abstract

We describe the design and implementation of a vacuum compatible laser-based absolute distance measurement system with subnanometer resolution. The presented system is compatible with operation in the 10–8-Torr range, and with some minor modifications it could be used in the 10–9-Torr range. The system is based on glancing incidence reflection and dual segmented diode detection. The system has been implemented as a focus sensor for extreme ultraviolet interferometry and microlithography experiments at Lawrence Berkeley National Laboratory's Advanced Light Source synchrotron radiation facility. A 3σ operational noise floor of 0.78 nm has been demonstrated.

Paper Details

Date Published: 1 January 2005
PDF: 5 pages
Opt. Eng. 44(1) 013605 doi: 10.1117/1.1830043
Published in: Optical Engineering Volume 44, Issue 1
Show Author Affiliations
Patrick P. Naulleau, Lawrence Berkeley National Lab. (United States)
Paul E. Denham, Lawrence Berkeley National Lab. (United States)
Senajith Rekawa, Lawrence Berkeley National Lab. (United States)

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