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Optical Engineering

Surface profiling using phase shifting Talbot interferometric technique
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Paper Abstract

We implement a phase-shifting Talbot interferometric technique to measure step heights of a single-step and channel (dip) objects. Experimentally recorded interferograms include noise due to grating lines and speckles. To make the phase map, four interferograms are recorded with /2 phase shifts. To remove noise due to grating lines and speckle, interferogram data are first filtered using Fourier filtering. Height variations per profile of the objects is calculated from the phase map made using Fourier-filtered data. Results obtained from this technique are compared with the results acquired from a profile projector having a coordinate measurement facility with a resolution of 1 µm and an accuracy of ±1 µm. The results are in good agreement.

Paper Details

Date Published: 1 January 2005
PDF: 6 pages
Opt. Eng. 44(1) 013601 doi: 10.1117/1.1827608
Published in: Optical Engineering Volume 44, Issue 1
Show Author Affiliations
Saba Mirza, Indian Institute of Technology Delhi (India)
Chandra Shakher, Indian Institute of Technology Delhi (India)

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