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Optical Engineering

Design and fabrication of multimode interference coupler with strong confinement structure on silicon-on-insulator
Author(s): Yanzhe Tang; Wenhui Wang; Yaming Wu; Jianyi Yang; Yuelin Wang
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Paper Abstract

A 1x8 multimode interference coupler with a strong confinement structure in the multimode region was proposed and fabricated on silicon-on-insulator material. In the multimode region, the waveguide was etched to the buried silica layer so as to realize the strong confinement and obtain better resolution of the self-imaging effect, while in the input/output ports, the rib waveguides with the large cross-section rib structure were designed to satisfy the single-mode condition, with which the device could be efficiently coupled with single-mode fibers or other waveguide devices. The fabrication process was also specially designed to eliminate the photolithography alignment error.

Paper Details

Date Published: 1 November 2004
PDF: 2 pages
Opt. Eng. 43(11) doi: 10.1117/1.1804545
Published in: Optical Engineering Volume 43, Issue 11
Show Author Affiliations
Yanzhe Tang, Zhejiang Univ. (China)
Wenhui Wang, Shanghai Institute of Microsystems and Information (China)
Yaming Wu, Shanghai Institute of Microsystems and Information (China)
Jianyi Yang, Zhejiang Univ. (China)
Yuelin Wang, Shanghai Institute of Microsystem and Information (China)

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