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Optical Engineering

Design and fabrication technologies for ultraviolet replicated micro-optics
Author(s): Hartmut Rudmann; Markus Rossi
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Paper Abstract

A wafer scale UV replication process is described that is suitable for mass production of micro-optical components. The fabrication process is divided into two phases. In phase 1, the design and mastering is done and a wafer-sized embossing tool is fabricated. In phase 2 of the process chain, the batch fabrication process is performed. From a single embossing tool, several identical wafer-sized replicas are fabricated that are then diced into the final components. Single-sided as well as double-sided replicas can be made. The economical flexibility of the UV replication chain is demonstrated through two application examples: High-quality components that pass strict environmental tests, which compete with etched silica structures, and low-cost micro-optical components, which compete with microinjection molded parts. All UV-replicated components have in common that they exhibit excellent optical quality and pass an IR reflow process.

Paper Details

Date Published: 1 November 2004
PDF: 8 pages
Opt. Eng. 43(11) doi: 10.1117/1.1803554
Published in: Optical Engineering Volume 43, Issue 11
Show Author Affiliations
Hartmut Rudmann, Heptagon Oy (Switzerland)
Markus Rossi, Heptagon Oy (Switzerland)

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