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Optical Engineering

Monolithically integrated refractive microlens array to improve imaging quality of an infrared focal plane array
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Paper Abstract

A simple reflow technique and reactive-ion etching are employed to fabricate and integrate a refractive square-apertured arch Si microlens array (MLA) on the back of an IR focal plane array device (IRFPA), resulting in the formation of a monolithic MLA/IRFPA device. The fabricated on-chip Si MLA behaves as optical concentrators and is used to collect most of the incident light from each pixel area on a smaller photosensitive area of the IRFPA, causing the IR response characteristics of the monolithic device to be improved greatly when compared with an ordinary IRFPA device without the MLA. The advantages of employing the reflow technique and the reactive-ion etching lie not only in the excellent surface smoothness and dimensional uniformity of the fabricated MLA, but also as a cost-effective and mass production technology.

Paper Details

Date Published: 1 November 2004
PDF: 6 pages
Opt. Eng. 43(11) doi: 10.1117/1.1801431
Published in: Optical Engineering Volume 43, Issue 11
Show Author Affiliations
Miao He, Nanyang Technological Univ. (Singapore)
Xiaocong Yuan, Nanyang Technological Univ. (Singapore)
Jonathan Kenjin Moh, Nanyang Technological Univ. (Singapore)
Jing Bu, Nanyang Technological Univ. (Singapore)
Xin-Jian Yi, Huazhong Univ. of Science and Technology (China)

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