Optical EngineeringReal-time range finder based on phase- and modulation-amplitude-locked laser diode interferometry
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An interferometric range finder that uses both phase-locked and modulation-amplitude-locked techniques in a sinusoidal phase-modulating interference signal is described. It allows us to perform unambiguous and real-time distance measurement. Also, external disturbance superimposed on the interference signal is eliminated by the feedback control. Our preliminary experiments indicate a measurement error of 17.7 μm rms.