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Optical Engineering

Experimental study on the measurement of micro structures
Author(s): Qingxiang Li; Yuhe Li; Boxiong Wang; Shifu Xue
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Paper Abstract

Measurement of micro structures is a key issue in microtechnology, and it will influence the production efficiency and quality of large-scale integrated circuits. An experimental study on the factors affecting the accuracy of measurement of micro structures has been carried out with a laboratory-built DXY-1 type linewidth measuring system. The experiment results show that the repeatability of the system is better than ±0.005 μm, and the difference between the nominal and measured values is less than ±0.02 μm.

Paper Details

Date Published: 1 November 2004
PDF: 6 pages
Opt. Eng. 43(11) doi: 10.1117/1.1795261
Published in: Optical Engineering Volume 43, Issue 11
Show Author Affiliations
Qingxiang Li, Tsinghua Univ. (China)
Yuhe Li, Tsinghua Univ. (China)
Boxiong Wang, Tsinghua Univ. (China)
Shifu Xue, Tsinghua Univ. (China)


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