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Journal of Micro/Nanolithography, MEMS, and MOEMS

Numerical method to predict and fabricate aspherical microlens arrays using 248-nm excimer laser ablation
Author(s): C. T. Pan; S. Shen; Chi-Chang Hsieh; Chi-Hui Chien; Yung-Chang Chen
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Paper Abstract

A method of numerical simulations is used to predict the profile of a 3-D aspherical microlens array. Based on the simulated results, the desired micro-optical lens profile is obtained through excimer laser ablation. The simulation method applied in the excimer laser ablation can significantly reduce the quantity of microablation experiments. The ablated microstructures with surface average roughness of Ra<20 nm are successfully achieved for micro-optical components. The excimer laser ablation parameters include laser fluence, shot number, workstation scanning velocity, and repetition rate. Various profiles of microlens and microprism arrays with different dimensions can utilize numerical simulation and form desired geometries by laser ablation.

Paper Details

Date Published: 1 October 2004
PDF: 8 pages
J. Micro/Nanolith. 3(4) doi: 10.1117/1.1794178
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 3, Issue 4
Show Author Affiliations
C. T. Pan, National Sun Yat-Sen Univ. (Taiwan)
S. Shen
Chi-Chang Hsieh
Chi-Hui Chien
Yung-Chang Chen


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