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Journal of Micro/Nanolithography, MEMS, and MOEMS

Ultrathick SU-8 fabrication for microreciprocating engines
Author(s): Peng Jin; Kyle C. Jiang; Nianjun Sun
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Paper Abstract

We present a high-quality UV-lithography process for making high aspect ratio microstructures for microengines using an ultrathick SU-8 photoresist layer. The microreciprocating engine project, which is ongoing at the University of Birmingham, aims to develop a compact power plant to replace batteries. The design of the microengine imposes strict requirements on the geometry of the engine components. The microfabrication research work has been concentrated on developing a SU-8 UV-lithography process to achieve good sidewall angles and high aspect ratio. Based on the study of the photoactive property of ultrathick SU-8 layers, an optimized prebake time is found for obtaining the minimum UV absorption of SU-8. The optimization process is tested and proven effective using a series of UV-lithography experiments on different prebake times. Microstructures with aspect ratios as high as 40:1 are produced in 1000-µm ultrathick SU-8 layers using standard UV-lithography equipment. The sidewall angles are controlled between 85 to 90 deg. The engine components fabricated using this process satisfy microengine design requirements.

Paper Details

Date Published: 1 October 2004
PDF: 5 pages
J. Micro/Nanolith. 3(4) doi: 10.1117/1.1793155
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 3, Issue 4
Show Author Affiliations
Peng Jin, Univ. of Birmingham (United Kingdom)
Kyle C. Jiang, Univ. of Birmingham (United Kingdom)
Nianjun Sun, Beijing Aeronautical Manufacturing Technology Rese (China)

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