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Journal of Micro/Nanolithography, MEMS, and MOEMS

Fabrication of microstructures in photoetchable glass ceramics using excimer and femtosecond lasers
Author(s): Joohan Kim; Halil Berberoglu; Xianfan Xu
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Paper Abstract

We discuss laser fabrication of microstructures in photoetchable glass ceramics called Foturan (Schott Company, Elmsford, NY). A KrF excimer laser (λ = 248 nm, τ = 25 ns) is used for surface micromachining, and a femtosecond laser (λ = 800 nm, τ = 80 fs) is used for fabricating 3-D structures. Important aspects of the machining, such as depth of machining resulting from different laser processing parameters and threshold laser fluences, are presented. A detailed analysis of the absorption process of both lasers in photoetchable glass ceramics is provided.

Paper Details

Date Published: 1 July 2004
PDF: 8 pages
J. Micro/Nanolith. 3(3) doi: 10.1117/1.1759330
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 3, Issue 3
Show Author Affiliations
Joohan Kim, Purdue Univ. (United States)
Halil Berberoglu, Purdue Univ. (United States)
Xianfan Xu, Purdue Univ. (United States)


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