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Journal of Micro/Nanolithography, MEMS, and MOEMS

Microelectromechanical system switching isolation amplifier for low frequency measurement
Author(s): Miao Lu; Zhengping Zhao; Xiaodong Hu; Xuefeng Zou; Hejun Guo
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Paper Abstract

A microelectromechanical systems (MEMS) isolation amplifier is presented, which uses MEMS switches to realize a "flying capacitor" structure. This isolation amplifier has the advantages of simple circuit structures, smaller dimensions, low cost, excellent electromagnetic compatibility (EMC) performance, easy to make multichannel isolation circuits, integration compatibility with on-chip electronics, etc. The performance of the MEMS switch exhibits 30-V pull-in voltage, 35-μs time delay, and 110-V breakdown voltage. The preliminary performance of the isolation amplifier is also demonstrated. To our knowledge, this work presents the first MEMS isolation amplifier structure.

Paper Details

Date Published: 1 July 2004
PDF: 5 pages
J. Micro/Nanolith. 3(3) doi: 10.1117/1.1758950
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 3, Issue 3
Show Author Affiliations
Miao Lu, Xidian Univ. (China)
Zhengping Zhao, Xidian Univ. (China)
Xiaodong Hu, Hebei Semiconductor Research Institute (China)
Xuefeng Zou, Hebei Semiconductor Research Institute (China)
Hejun Guo, Hebei Semiconductor Research Institute (China)


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