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Optical Engineering

Single-wavelength monitoring method for optical thin-film coating
Author(s): Cheng Zhang; Yongtian Wang; Weiqiang Lu
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Paper Abstract

A new optical monitoring method for thin-film coating is described. Based on the admittance loci theory of Macleod, the traditional turning point method, and level monitoring method, the new method is able to compensate the coating error and break the transfer of error to the subsequent layers. The method can be applied to monitor deposition of quarter-wave optical thickness films or nonquarter-wave optical thickness films. Theoretical analysis shows the method can effectively improve the monitoring accuracy.

Paper Details

Date Published: 1 June 2004
PDF: 6 pages
Opt. Eng. 43(6) doi: 10.1117/1.1719027
Published in: Optical Engineering Volume 43, Issue 6
Show Author Affiliations
Cheng Zhang, Beijing Institute of Technology (China)
Yongtian Wang, Beijing Institute of Technology (China)
Weiqiang Lu, Beijing Institute of Technology (China)

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