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Optical Engineering

Thermo-optic variable optical attenuator with low power consumption fabricated on silicon-on-insulator by anisotropic chemical etching
Author(s): Jinsong Xia; Jinzhong Yu; Zhongcao Fan; Zhangtao Wang; Shaowu Chen
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Paper Abstract

A thermo-optic Mach-Zehnder (MZ) variable optical attenuator based on silicon waveguides with a large cross section was designed and fabricated on silicon-on-insulator (SOI) wafer. Multimode interferometers were used as power splitters and combiners in the MZ structure. In order to achieve a smooth interface, anisotropic chemical etching of silicon was used to fabricate the waveguides. Isolating grooves were introduced to reduce power consumption and device length. The device has a low power consumption of 210 mW and a response time of 50 µs.

Paper Details

Date Published: 1 April 2004
PDF: 2 pages
Opt. Eng. 43(4) doi: 10.1117/1.1648652
Published in: Optical Engineering Volume 43, Issue 4
Show Author Affiliations
Jinsong Xia, Institute of Semiconductors (China)
Jinzhong Yu, Institute of Semiconductors (China)
Zhongcao Fan, Institute of Semiconductors (China)
Zhangtao Wang, Institute of Semiconductors (China)
Shaowu Chen, Institute of Semiconductors (China)


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