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Optical Engineering

Phase-height mapping and coordinate calibration simultaneously in phase-measuring profilometry
Author(s): Xianyu Su; Wanzhong Song; Yiping Cao; Liqun Xiang
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Paper Abstract

A new method for both the phase-height mapping and the 3-D coordinate calibration in phase-measuring profilometry (PMP) is presented. A calibration gauge containing four virtual calibration planes is designed. The application of the calibration gauge avoids the translation of the standard plane during the calibration process. Furthermore, circular steps are designed to calibrate lateral coordinates automatically. With this calibration gauge, both the phase-height mapping and lateral coordinates calibration could be done simultaneously through only one measurement. Additionally, to recover a continuous phase distribution of all the steps with the same height, an iterative procedure is proposed. The effectiveness of the proposed method is demonstrated by experimental results.

Paper Details

Date Published: 1 March 2004
PDF: 5 pages
Opt. Eng. 43(3) doi: 10.1117/1.1646178
Published in: Optical Engineering Volume 43, Issue 3
Show Author Affiliations
Xianyu Su, Sichuan Univ. (China)
Wanzhong Song, Sichuan Univ. (China)
Yiping Cao, Sichuan Univ. (China)
Liqun Xiang, Sichuan Univ. (China)

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