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Journal of Micro/Nanolithography, MEMS, and MOEMS

Measurement of the refractive index and thermo-optic coefficient of water near 193 nm
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Paper Abstract

We present accurate measurements of several important optical constants of high-purity water for wavelengths near 193.39 nm at 21.50°C: the absolute refractive index n = 1.436 62(2), the dispersion dn/dλ = -2.109(17)×10-3 nm-1, and the thermo-optic coefficient dn/dT = -1.00(4)×10-4 (°C)-1. We determine these values by two independent approaches, the minimum deviation prism method and an interferometric technique, and find that they give mutually consistent results.

Paper Details

Date Published: 1 January 2004
PDF: 5 pages
J. Micro/Nanolith. 3(1) doi: 10.1117/1.1632501
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 3, Issue 1
Show Author Affiliations
John H. Burnett, National Institute of Standards and Technology (United States)
Simon G. Kaplan, National Institute of Standards and Technology (United States)


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