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Journal of Micro/Nanolithography, MEMS, and MOEMS

SURFACE MICROMACHINING
Author(s): Jeffry J. Sniegowski; James H. Smith
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Paper Details

PDF: 1 pages
J. Micro/Nanolith. 2(4) doi: 10.1117/1.1616574
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 2, Issue 4, October 2003
Show Author Affiliations
Jeffry J. Sniegowski, HT Microanalytical Inc. (United States)
James H. Smith, Sandia National Labs. (United States)


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