Share Email Print
cover

Journal of Micro/Nanolithography, MEMS, and MOEMS

Replication of micro-optical components by ultraviolet-molding process
Author(s): Seok-Min Kim; Dongmook Kim; Shinill Kang
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

An experimental method is presented to maximize the replication quality of UV-molded micro-optical components. It is important to maximize the replication quality to obtain the replicated micro-optical components with the desired properties by accurate control of the shape. We suggest a simple technique to avoid micro air bubbles. The effects of the UV-curing dose and the compression pressure on the replication quality of UV-molded structures are examined experimentally. Finally, as a practical application of the process design method, microlens arrays with diameters between 30 and 230 μm were fabricated by the presented method, and the replication quality and the optical properties of the replicated microlens are measured and analyzed.

Paper Details

Date Published: 1 October 2003
PDF: 4 pages
J. Micro/Nanolith. 2(4) doi: 10.1117/1.1611183
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 2, Issue 4
Show Author Affiliations
Seok-Min Kim, Yonsei Univ. (South Korea)
Dongmook Kim, Yonsei Univ. (South Korea)
Shinill Kang, Yonsei Univ. (South Korea)


© SPIE. Terms of Use
Back to Top