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Journal of Micro/Nanolithography, MEMS, and MOEMS

Two-dimensional microlens arrays in silica-on-silicon planar lightwave circuit technology
Author(s): Alexei L. Glebov; Lidu Huang; Shinegori Aoki; Michael Lee; Kishio Yokouchi
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Paper Abstract

Two-dimensional (2-D) microlens arrays have been fabricated with silica-on-silicon planar lightwave circuit (PLC) technology. Several experimental techniques and computer simulation methods are applied to characterize properties of single and double microlens arrays, with one and two refracting surfaces, respectively. Systematic comparison of the measured and simulated beam propagation profiles enables optimization of the lens and module design resulting in higher input-output coupling efficiency. The insertion losses of the lens-slab-lens optical modules with 90-mm-long slab waveguides are measured to be 2.1 and 3.5 dB for the double and single lens modules, respectively. Comprehensive analysis reveals the major loss contributions. Excess losses of the modules caused by variations of the lens curvatures, material refractive indexes, light wavelength, etc., can be controlled within the acceptable limits. Further possibilities for the module loss reduction are discussed. Fairly weak wavelength dependence as well as overall stability of the module properties indicate that the microlens arrays are suitable for dense wavelength division multiplexing (DWDM) photonic networks.

Paper Details

Date Published: 1 October 2003
PDF: 10 pages
J. Micro/Nanolith. 2(4) doi: 10.1117/1.1610481
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 2, Issue 4
Show Author Affiliations
Alexei L. Glebov, Fujitsu Labs. of America, Inc. (United States)
Lidu Huang, Fujitsu Labs. of America (United States)
Shinegori Aoki, Fujitsu Labs. of America (United States)
Michael Lee, Fujitsu Labs. of America. Inc. (United States)
Kishio Yokouchi, Fujitsu Labs. of America, Inc. (United States)


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