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Journal of Micro/Nanolithography, MEMS, and MOEMS

New design for surface micromachined bistable and multistable switches
Author(s): Ian Foulds; Maria Trinh; Sam Hu; Steven W. Liao; Robert W. Johnstone; M. Parameswaran DUPLICATE RECORD - Do Not U
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Paper Abstract

Microsystems often require switches or mechanisms to provide two stable states. In answer to this need, we design a novel micromechanical bistable switch based on the locking mechanism commonly used in extension ladders. This switch was designed and fabricated through the multiuser MEMS processes (MUMPs). Actual performance of the switch was videotaped, analyzed, and compared with theory and simulation. This design was fully functional on the first design iteration, and can easily be extended to provide multiple stable states. We outline the design, simulation, and results from the testing of the microfabricated system.

Paper Details

Date Published: 1 October 2003
PDF: 4 pages
J. Micro/Nanolith. 2(4) doi: 10.1117/1.1610476
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 2, Issue 4
Show Author Affiliations
Ian Foulds, Simon Fraser Univ. (Canada)
Maria Trinh, Simon Fraser Univ. (Canada)
Sam Hu, Simon Fraser Univ. (Canada)
Steven W. Liao, Simon Fraser Univ. (Canada)
Robert W. Johnstone, Simon Fraser Univ. (Canada)
M. Parameswaran DUPLICATE RECORD - Do Not U, Simon Fraser Univ. (Canada)


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