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Journal of Micro/Nanolithography, MEMS, and MOEMS

High fill-factor avalanche photodetectors for near-infrared free-space photonic networks
Author(s): Saurabh K. Lohokare; Dennis W. Prather; Thomas E. Dillon; Anita Sure; Oleg V. Sulima; Jeffery A. Cox; Michael G. Mauk
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Paper Abstract

Diffractive optical elements (DOEs) offer the ability to boost fill factors of high-speed (field-of-view limited) near-infrared detectors. In this context, we have investigated the design and fabrication of a system that involves integration of DOEs with avalanche photodetectors (APDs). These APDs are implemented in the antimonide material system for operation around a 2.1-μm wavelength. Consequently, such systems could be used to reduce the required threshold power at free-space photonic receivers. To this end, we present the design and fabrication technologies for the DOEs, APDs, and their integration using polymer-based flip-chip interconnections.

Paper Details

Date Published: 1 October 2003
PDF: 12 pages
J. Micro/Nanolith. 2(4) doi: 10.1117/1.1607967
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 2, Issue 4
Show Author Affiliations
Saurabh K. Lohokare, Univ. of Delaware (United States)
Dennis W. Prather, Univ. of Delaware (United States)
Thomas E. Dillon, Univ. of Delaware (United States)
Anita Sure, Univ. of Delaware (United States)
Oleg V. Sulima, AstroPower, Inc. (United States)
Jeffery A. Cox, AstroPower, Inc. (United States)
Michael G. Mauk, AstroPower, Inc. (United States)


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