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Optical Engineering

Simple fabrication of cylindrical sol-gel microlens array by reflowing technique
Author(s): Miao He; Xiaocong Yuan; Nam Quoc Ngo; Wai Chye Cheong; Jing Bu
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Paper Abstract

In this paper, we report the fabrication of a 128-×1024-element cylindrical microlens array in a low-cost inorganic-organic SiO2/ZrO2 sol-gel glass using reflowing technique. The fabricated microlens array had excellent surface smoothness and dimension uniformity. The prime advantages of the hybrid sol-gel material are its suitability as an etching-free negative-tone UV-sensitive material, uniformity, and other excellent optical properties. Microfabrication in sol-gel glass using the reflowing technique is demonstrated as a cost-effective and high-volume production technology for micro-optical elements.

Paper Details

Date Published: 1 August 2003
PDF: 2 pages
Opt. Eng. 42(8) doi: 10.1117/1.1591195
Published in: Optical Engineering Volume 42, Issue 8
Show Author Affiliations
Miao He, Nanyang Technological Univ. (Singapore)
Xiaocong Yuan, Nanyang Technological Univ. (Singapore)
Nam Quoc Ngo, Nanyang Technological Univ. (Singapore)
Wai Chye Cheong, Nanyang Technological Univ. (Singapore)
Jing Bu, Nanyang Technological Univ. (Singapore)


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