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Optical Engineering

Digital microholointerferometer: development and validation
Author(s): Lei Xu; Xiaoyuan Peng; Anand Krishna Asundi; Jianmin Miao
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Paper Abstract

The development of an in-line digital microholointerferometer for micromechanical testing is presented. With respect to the specific requirements on the microscopic scheme in micromeasurement, the application of a long-distance microscope is introduced with emphasis. A critical issue, validation of the developed system, is addressed. Aided by finite element analysis and analytical calculation, experimental measurement with the system is examined using a hybrid approach. To evaluate the performance of the system, a microbeam experiment is presented. Results measured with the system, as well as the numerical simulations, are obtained. Quantitative comparisons are carried out in terms of load-induced variations of the test sample, based on which the conclusions are given.

Paper Details

Date Published: 1 August 2003
PDF: 7 pages
Opt. Eng. 42(8) doi: 10.1117/1.1589026
Published in: Optical Engineering Volume 42, Issue 8
Show Author Affiliations
Lei Xu, Nanyang Technological Univ. (United States)
Xiaoyuan Peng, Beihang Univ. (China)
Anand Krishna Asundi, Nanyang Technological Univ. (Singapore)
Jianmin Miao, Nanyang Technological Univ. (Singapore)

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