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Optical Engineering

Fluorescent microscopy of wet-cleaned surfaces: imaging of water stains distribution
Author(s): Katrina Mikhaylich; V. V. Yakovlev
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Paper Abstract

We use fluorescence optical microscopy to identify water stains on the surface of wet-cleaned silicon wafers. By using a commonly used confocal microscope, submicron resolution is routinely achieved, and both micro- and macroscopic distribution of water stains can be measured. The proposed technique is easy to implement, does not require any special conditions such as vacuum, and can serve as a powerful method in determining the optimal conditions for wet cleaning.

Paper Details

Date Published: 1 July 2003
PDF: 5 pages
Opt. Eng. 42(7) doi: 10.1117/1.1578493
Published in: Optical Engineering Volume 42, Issue 7
Show Author Affiliations
Katrina Mikhaylich, Lam Research Corp. (United States)
V. V. Yakovlev, Univ. of Wisconsin (United States)


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