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Optical Engineering

Optical design of a scatterometer with an ellipsoidal mirror
Author(s): Martha Rosete-Aguilar; Oscar Rodriguez Herrera; Neil Charles Bruce
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Paper Abstract

We analyze within the first-order approximation the design of a scatterometer with a prolate ellipsoidal mirror that collects the light from a rough surface and a subsidiary optical system that focuses the light onto an image plane.

Paper Details

Date Published: 1 June 2003
PDF: 6 pages
Opt. Eng. 42(6) doi: 10.1117/1.1573641
Published in: Optical Engineering Volume 42, Issue 6
Show Author Affiliations
Martha Rosete-Aguilar, Univ. Nacional Autonoma de Mexico (Mexico)
Oscar Rodriguez Herrera, Univ. Nacional Autonoma de Mexico (Mexico)
Neil Charles Bruce, Univ. Nacional Autonoma de Mexico (Mexico)


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