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Optical Engineering

Fabrication of digital sinusoidal gratings and precisely controlled diffusive flats and their application to highly accurate projected fringe profilometry
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Paper Abstract

Fabrication of digital sinusoidal gratings and precisely controlled diffusive flats and their application to calibration-based highly accurate phase-shifting projected fringe profilometry are presented. The main advantages of using digital sinusoidal gratings are (1) high geometrical accuracy (< 1 μm); (2) high contrast ratio; and (3) very low high-order harmonic distortion. In addition, a high-quality diffusive flat with precisely controlled lateral correlation length, fabricated by VLSI processes, offers a good calibration standard. It is found that, by applying these two components to the calibration-based phase-shifting projected fringe profilometry, absolute 3-D surface profile measurement accuracy on the order of microns can be achieved.

Paper Details

Date Published: 1 June 2003
PDF: 11 pages
Opt. Eng. 42(6) doi: 10.1117/1.1573217
Published in: Optical Engineering Volume 42, Issue 6
Show Author Affiliations
Wei-Hung Su, The Pennsylvania State Univ. (United States)
Hongyu Liu, The Pennsylvania State Univ. (United States)
Karl Richard, The Pennsylvania State Univ. (United States)
Shizhuo Yin, The Pennsylvania State Univ. (United States)
Francis T. S. Yu, The Pennsylvania State Univ. (United States)


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