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Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access

Cost of Scaling
Author(s): Burn J. Lin

Paper Abstract

This PDF file contains the editorial “Cost of Scaling” for JM3 Vol. 2 Issue 02

Paper Details

Date Published: 1 April 2003
PDF
J. Micro/Nanolith. MEMS MOEMS 2(2) doi: 10.1117/1.1568106
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 2, Issue 2
Show Author Affiliations
Burn J. Lin, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)


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