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Optical Engineering

Measurement of mechanical properties of materials in the micrometer range using electronic holographic moire
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Paper Abstract

Measuring mechanical properties of specimens whose dimensions are in the range of micrometers poses a number of difficult and interesting problems. Currently there are a number of developments in this area, especially in connection with microelectromechanical systems (MEMS). Electronic holographic moiré is an ideal tool for micromechanics studies. It does not require a modification of the surface by the introduction of a reference grating. This is of particular value when placing a reference grating becomes a difficult task. Traditional electronic holographic moiré presents some difficult problems when large magnifications are needed and rigid body motion causes the loss of the correlation fringes. We present developments that solve these problems and extend the application of the technique to micromechanics.

Paper Details

Date Published: 1 May 2003
PDF: 8 pages
Opt. Eng. 42(5) doi: 10.1117/1.1566004
Published in: Optical Engineering Volume 42, Issue 5
Show Author Affiliations
Cesar A. Sciammarella, Illinois Institute of Technology (United States)
Federico M. Sciammarella, Illinois Institute of Technology (United States)


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