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Optical Engineering

Valve cone measurement using white light interference microscopy in a spherical measurement geometry
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Paper Abstract

We describe an interference microscope for valve cone angle, roundness, straightness, and waviness using scanning white light interferometry. Our unusual test geometry creates a spherical optical measurement surface centered at an optical datum point that represents the center of curvature of the mating valve needle or ball. A radial scan locates intersections of the measurement surface with respect to the datum point, and software reconstructs the conical sample surface by means of a calibrated mapping function. This flexible approach accommodates a wide range of cone angles and diameters without a change of optics. Experimental results show promising performance, including a 0.02-μm standard deviation for cone roundness, including sample removal and replacement.

Paper Details

Date Published: 1 May 2003
PDF: 6 pages
Opt. Eng. 42(5) doi: 10.1117/1.1565350
Published in: Optical Engineering Volume 42, Issue 5
Show Author Affiliations
Peter J. de Groot, Zygo Corp. (United States)
Xavier Colonna de Lega, Zygo Corp. (United States)


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