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Optical Engineering

Optical waveguide fabrication by combination of spin-on-glass and plasma-enhanced chemical vapor deposition for optoelectronic integration
Author(s): Tomiyuki Arakawa; Tatsushi Hasegawa; Masatoshi Kagawa
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Paper Details

Date Published: 1 April 2003
PDF: 2 pages
Opt. Eng. 42(4) doi: 10.1117/1.1558392
Published in: Optical Engineering Volume 42, Issue 4
Show Author Affiliations
Tomiyuki Arakawa, Oki Electric Industry Co. Ltd. (Japan)
Tatsushi Hasegawa, Oki Electric Industry Co. Ltd. (Japan)
Masatoshi Kagawa, Oki Electric Industry Co. Ltd. (Japan)

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