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Optical Engineering

Study of the beam path distortion profiles generated by a two-axis tilt single-mirror laser scanner
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Paper Abstract

Beam distortion profiles are studied for scanning devices that have a single mirror with two rotational degrees of freedom (DOF), also named tip/tilt scanners. The case of a fast steering scanner used for high power material processing applications is studied. The scanner has a bandwidth of 700 Hz, a range of motion of ∓52 mrad (∓3 deg), and a resolution <5 μrad. The main dominant parameters that affect the distortion profile are identified. Furthermore, a vector analysis is derived to represent these distortions, and equations of the correction factors used to compensate for the systematic errors are proposed. A final accuracy better than 0.05% is obtained when these compensation factors are taken into account. The derivation proposed here can be extended to any scanning device with a single mirror with two-rotation DOF.

Paper Details

Date Published: 1 April 2003
PDF: 10 pages
Opt. Eng. 42(4) doi: 10.1117/1.1557694
Published in: Optical Engineering Volume 42, Issue 4
Show Author Affiliations
Moustapha Hafez, Commissariat a l'Energie Atomique (France)
Thomas C. Sidler, Swiss Federal Institute of Technology (Switzerland)
Rene-Paul Salathe, Swiss Federal Institute of Technology (Switzerland)

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