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Optical Engineering

Fiber optic off-focus sensor for surface topography measurement
Author(s): Yong Zhao; Yanbiao Liao; Shurong Lai
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Paper Abstract

A fiber optic-based off-focus surface topography sensor is proposed based on beam reflection. A specially arranged fiber optic probe with an objective microlens is used for the surface off-focus detection, and a CCD to reduce the inconsistency of the discrete detectors and the difficulties of the multichannel simultaneous signal acquisition. According to the unique signal analysis methods, surface topography as well as distance between the measured surface and sensor probe can be obtained at one measurement setup. Sensor structure and the measurement principle are described, and theoretical analysis and preliminary experimental results indicate the validity and feasibility of the proposed method.

Paper Details

Date Published: 1 March 2003
PDF: 5 pages
Opt. Eng. 42(3) doi: 10.1117/1.1539052
Published in: Optical Engineering Volume 42, Issue 3
Show Author Affiliations
Yong Zhao, Tsinghua Univ. (China)
Yanbiao Liao, Tsinghua Univ. (China)
Shurong Lai, Tsinghua Univ. (China)

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