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Journal of Micro/Nanolithography, MEMS, and MOEMS

Is There a Future in Microlithography?
Author(s): Burn J. Lin
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J. Micro/Nanolith. 2(1) doi: 10.1117/1.1536623
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 2, Issue 1, January 2003
Show Author Affiliations
Burn J. Lin, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)


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