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Optical Engineering

Improved sol-gel thin film for fabrication of multilevel structures using an HEBS gray scale mask
Author(s): XiaoCong Yuan; W. X. Yu; Nam Quoc Ngo; Wai Chye Cheong
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Paper Abstract

A new photosensitive negative-tone inorganic-organic hybrid SiO2/TiO2 glass with improved linear UV response property is investigated for fabrication of multilevel structures. The UV response of the sol-gel material is studied as a function of optical densities (ODs) of a high-energy beam-sensitive (HEBS) gray-scale mask. It is shown that the sol-gel material exhibits a good linear response to the OD values, which is ultimately used to define the surface profile height for a specific design. The linearity is especially useful for fabrication of diffractive optical elements with linear phase distributions. As an example, we apply the sol-gel process and the gray-scale mask to the fabrication of a blazed grating.

Paper Details

Date Published: 1 February 2003
PDF: 2 pages
Opt. Eng. 42(2) doi: 10.1117/1.1535202
Published in: Optical Engineering Volume 42, Issue 2
Show Author Affiliations
XiaoCong Yuan, Nanyang Technological Univ. (Singapore)
W. X. Yu, Nanyang Technological Univ. (Singapore)
Nam Quoc Ngo, Nanyang Technological Univ. (Singapore)
Wai Chye Cheong, Nanyang Technological Univ. (Singapore)

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