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Optical Engineering

Large surface profile measurement with instantaneous phase-shifting interferometry
Author(s): N. R. Sivakumar; W. K. Hui; Krishnan Venkatakrishnan; B. K. A. Ngoi
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Paper Abstract

Surface profile measurement of smooth surfaces is a vital area in many of today's industries, especially in wafer fabrication. The increased need for high-speed, noncontact online measurement with high accuracy and repeatability is of great interest for practical purposes. In this work, a modification of Michelson interferometers in combination with instantaneous phase-shifting interferometry is proposed for high-speed large flat-surface profiling. Experiments are carried out on a patterned wafer surface. The results obtained using this system are compared with a commercial profiler system to demonstrate the validity of the principle.

Paper Details

Date Published: 1 February 2003
PDF: 6 pages
Opt. Eng. 42(2) doi: 10.1117/1.1532331
Published in: Optical Engineering Volume 42, Issue 2
Show Author Affiliations
N. R. Sivakumar, Nanyang Technological Univ. (Singapore)
W. K. Hui, Nanyang Technological Univ. (Singapore)
Krishnan Venkatakrishnan, Nanyang Technological Univ. (Singapore)
B. K. A. Ngoi, Nanyang Technological Univ. (Singapore)

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