Journal of Micro/Nanolithography, MEMS, and MOEMSDetermination of optical alignment in free-space micro-optical-bench systems using paraxial ray-transfer matrices
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We present an extension to the ray-transfer matrix method, which is often used to characterize optical systems. The main purpose of the extended method is to model micro-optical-bench systems that are usually manufactured using surface micromachining and other microfabrication technologies. Using a homogeneous coordinate system to extend standard ray-transfer matrices allows the matrix notation to account for manufacturing tolerances. As an example of this method's usefulness, we calculate the coupling losses in a surface micromachined fiber-optic switch.