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Optical Engineering

Deformation measurement of a micro-RF capacitive switch membrane using laser interferometry
Author(s): Chenggen Quan; Shihua Wang; Cho Jui Tay; Ai Qun Liu; Huai Min Shang
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Paper Abstract

We have developed a measurement method to evaluate deformation of a metallic membrane (thickness 2 μm) in a micro-radio-frequency switch. The method is based on a modified Michelson interferometer incorporated with optoelectronic devices including a He-Ne laser, conventional optics, a CCD sensor, and a photodiode. To detect the deformation of the membrane in the rf switch, a He-Ne laser probe 10 µm in diameter is directed onto the specimen. The laser beam reflected off the membrane is combined with a reference beam. The combined laser beams are regulated to follow a common path. The resulting circular interference fringe pattern is simultaneously recorded by a CCD sensor and a photodiode. The deformation of the membrane is determined from the order of the resulting fringe pattern. As demonstrated by the experimental results, the proposed method is capable of measuring deformation of the rf switch at submicron levels.

Paper Details

Date Published: 1 January 2003
PDF: 6 pages
Opt. Eng. 42(1) doi: 10.1117/1.1525795
Published in: Optical Engineering Volume 42, Issue 1
Show Author Affiliations
Chenggen Quan, National Univ. of Singapore (Singapore)
Shihua Wang, National Univ. of Singapore (Singapore)
Cho Jui Tay, National Univ. of Singapore (Singapore)
Ai Qun Liu, Nanyang Technological Univ. (Singapore)
Huai Min Shang, National Univ. of Singapore (Singapore)

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