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Optical Engineering

Optical fiber interferometer for measuring the in situ deflection characteristics of MEMS structures
Author(s): Tristan Jorge Tayag; Edward S. Kolesar; Kam See Hoon; James Marchetti; Ijaz H. Jafri
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Paper Abstract

An optical fiber interferometer is described for measuring the out-of-plane displacement of microelectromechanical structures. The interferometric system has a theoretical measurement dynamic range greater than 108. Experimental results characterizing an electrostatically actuated polysilicon flexure beam are presented. The results are in good agreement with modeling data based on coupled boundary-element and finite-element analysis.

Paper Details

Date Published: 1 January 2003
PDF: 7 pages
Opt. Eng. 42(1) doi: 10.1117/1.1525275
Published in: Optical Engineering Volume 42, Issue 1
Show Author Affiliations
Tristan Jorge Tayag, Texas Christian Univ. (United States)
Edward S. Kolesar, Texas Christian Univ. (United States)
Kam See Hoon, Nanyang Polytechnic (Singapore)
James Marchetti, Corning IntelliSense (United States)
Ijaz H. Jafri, Corning IntelliSense (United States)

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