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Optical Engineering

Three-dimensional optical metrology with extended depth-measuring range using a holographic axilens
Author(s): Erez Hasman; Vladimir Kleiner
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Paper Abstract

A method of 3-D optical metrology based on a triangulation system using holographic axilens to increase the depth-measuring range without any decrease in the axial or the lateral resolution is presented. The element is designed according to an analytic ray-tracing optimization approach and is recorded as a computer-generated hologram. A sixfold increase in the depth-measuring range is experimentally obtained while nearly diffraction limited light spots are completely maintained.

Paper Details

Date Published: 1 January 2003
PDF: 5 pages
Opt. Eng. 42(1) doi: 10.1117/1.1524170
Published in: Optical Engineering Volume 42, Issue 1
Show Author Affiliations
Erez Hasman, Technion-Israel Institute of Technology (Israel)
Vladimir Kleiner, Technion-Israel Institute of Technology (Israel)

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