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Optical Engineering

Integrated opto-electric sensor for measurement of micro-displacement, roughness and micro-profile
Author(s): Zhaofei Zhou; Tao Zhang; Wenjie Li; Wei Huang
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Paper Details

Date Published: 1 December 2002
PDF: 6 pages
Opt. Eng. 41(12) doi: 10.1117/1.1518507
Published in: Optical Engineering Volume 41, Issue 12
Show Author Affiliations
Zhaofei Zhou, Sichuan Univ. (China)
Tao Zhang, Sichuan Univ. (China)
Wenjie Li, Sichuan Univ. (China)
Wei Huang, Sichuan Univ. (China)

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