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Optical Engineering

Integrated opto-electric sensor for measurement of micro-displacement, roughness and micro-profile
Author(s): Zhaofei Zhou; Tao Zhang; Wenjie Li; Wei Huang
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Paper Abstract

A study of integration for different sensing functions is described. Three different noncontact measuring functions, including a micrometer, a roughness meter, and a profilometer, are integrated into one new sensor. In this sensor, one common laser source, optical system, and photodetector are shared. Based on the theory of laser scattering and interferometry, this sensor can be used to measure the surface roughness and microprofile with the measurement range of Ra = 0.001 to 3 μm. Based on the theory of triangulation this sensor can be used to measure the microdisplacement with a measurement range of 0.5 to 300 μm. The accuracies of this sensor are similar to each existing single sensor for the same function. A typical application of this sensor is to complete the measurements of the diameter, surface quality, and form error of a cylinder or cannon in operation. This integrated sensor is applicable to design a virtual instrument with multiple functions.

Paper Details

Date Published: 1 December 2002
PDF: 6 pages
Opt. Eng. 41(12) doi: 10.1117/1.1518507
Published in: Optical Engineering Volume 41, Issue 12
Show Author Affiliations
Zhaofei Zhou, Sichuan Univ. (China)
Tao Zhang, Sichuan Univ. (China)
Wenjie Li, Sichuan Univ. (China)
Wei Huang, Sichuan Univ. (China)

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