Journal of Micro/Nanolithography, MEMS, and MOEMS • Open Access
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Date Published: 1 October 2002
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J. Micro/Nanolith. MEMS MOEMS 1(3) doi: 10.1117/1.1512906
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 1, Issue 3
J. Micro/Nanolith. MEMS MOEMS 1(3) doi: 10.1117/1.1512906
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 1, Issue 3
Show Author Affiliations
Burn J. Lin, Taiwan Semiconductor Manufacturing Co. Ltd. (Taiwan)
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