Share Email Print
cover

Optical Engineering

Enhanced soft x-ray reflectivity of Cr/Sc multilayers by ion-assisted sputter deposition
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Details

Date Published: 1 November 2002
PDF: 7 pages
Opt. Eng. 41(11) doi: 10.1117/1.1510750
Published in: Optical Engineering Volume 41, Issue 11
Show Author Affiliations
Fredrik Eriksson, Linkoeping Univ. (Sweden)
Goeran A. Johansson, Royal Institute of Technology (Sweden)
Hans M. Hertz, Royal Institute of Technology (Sweden)
Jens Birch, Linkoeping Univ. (Sweden)


© SPIE. Terms of Use
Back to Top