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Optical Engineering

Enhanced soft x-ray reflectivity of Cr/Sc multilayers by ion-assisted sputter deposition
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Paper Details

Date Published: 1 November 2002
PDF: 7 pages
Opt. Eng. 41(11) doi: 10.1117/1.1510750
Published in: Optical Engineering Volume 41, Issue 11
Show Author Affiliations
Fredrik Eriksson, Linkoeping Univ. (Sweden)
Goeran A. Johansson, Royal Institute of Technology (Sweden)
Hans M. Hertz, Royal Institute of Technology (Sweden)
Jens Birch, Linkoeping Univ. (Sweden)

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