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Optical Engineering

Rigorous coupled-wave analysis calculus of submicrometer interference pattern and resolving edge position versus signal-to-noise ratio
Author(s): Alexander V. Tavrov; Michael Totzeck; Norbert Kerwien; Hans J. Tiziani
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Paper Details

Date Published: 1 August 2002
PDF: 7 pages
Opt. Eng. 41(8) doi: 10.1117/1.1490589
Published in: Optical Engineering Volume 41, Issue 8
Show Author Affiliations
Alexander V. Tavrov, Univ. Stuttgart (Germany)
Michael Totzeck, Univ. Stuttgart (Germany)
Norbert Kerwien, Univ. Stuttgart (Germany)
Hans J. Tiziani, Univ. Stuttgart (Germany)

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