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Optical Engineering

Nanometer deep shaping with fluid jet polishing
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Paper Details

Date Published: 1 August 2002
PDF: 6 pages
Opt. Eng. 41(8) doi: 10.1117/1.1489677
Published in: Optical Engineering Volume 41, Issue 8
Show Author Affiliations
Silvia M. Booij, Technische Univ. Delft (Netherlands)
Hedser H. van Brug, Technische Univ. Delft (Netherlands)
Joseph J. M. Braat, Technische Univ. Delft (Netherlands)
Oliver W. Faehnle, Fisba Optik (Switzerland)


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