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Optical Engineering

Nanometer deep shaping with fluid jet polishing
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Paper Abstract

We describe the theoretical dependence of various important parameters of the fluid jet polishing process on the material removal rate: the processing time, abrasive concentration, abrasive diameter, particle velocity, and the effect of scanning. Some recent experiments are described that prove that it is possible to remove very small amounts of material, less than 1 nm/min, using either short processing times or an appropriate slurry. The removal spot in the stationary case is compared to that in the translational case both theoretically and experimentally. From both a theoretical and an experimental point of view it is shown that the removal is in the ductile regime.

Paper Details

Date Published: 1 August 2002
PDF: 6 pages
Opt. Eng. 41(8) doi: 10.1117/1.1489677
Published in: Optical Engineering Volume 41, Issue 8
Show Author Affiliations
Silvia M. Booij, Technische Univ. Delft (Netherlands)
Hedser H. van Brug, Technische Univ. Delft (Netherlands)
Joseph J. M. Braat, Technische Univ. Delft (Netherlands)
Oliver W. Faehnle, Fisba Optik (Switzerland)

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