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Journal of Micro/Nanolithography, MEMS, and MOEMS

Diffraction theory of the knife-edge test and its improved form: the phase-contrast method
Author(s): Frits Zernike
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Paper Abstract

On the basis of Abbe's diffraction theory of optical imaging, the appearance of a concave mirror with arbitrarily shaped small deviations in Foucault's knife-edge test and the new phase-contrast test is evaluated. The orthogonal "circle polynomials" are found and applied to the diffraction phenomena of circular mirrors.

Paper Details

Date Published: 1 July 2002
PDF: 8 pages
J. Micro/Nanolith. 1(2) doi: 10.1117/1.1488608
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 1, Issue 2
Show Author Affiliations
Frits Zernike, Univ. of Groningen (Netherlands)

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