Share Email Print
cover

Journal of Micro/Nanolithography, MEMS, and MOEMS

KrF excimer laser trenching of X-cut LiNbO3 for realization of optimized optical modulator electrode structures
Author(s): Han-Woo Chong; Arnan Mitchell; Jason P. Hayes; Michael W. Austin
Format Member Price Non-Member Price
PDF $20.00 $25.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

An investigation of the micromachining of trenches in lithium niobate (LiNbO3) using direct imaged 248 nm KrF excimer laser ablation is presented. Trenches 20 μm wide and 0.5-7.5 μm deep have been produced. These trenches are assessed and are deemed suitable for the machining of integrated electro-optic structures. Based on the characterized ablation conditions, trenches of high quality have been successfully fabricated on an X-cut optical modulator which is potentially important for the realization of efficient broadband optical intensity modulators.

Paper Details

Date Published: 1 July 2002
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 1(2) doi: 10.1117/1.1484160
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 1, Issue 2
Show Author Affiliations
Han-Woo Chong, RMIT Univ. (Australia)
Arnan Mitchell, RMIT Univ. (Australia)
Jason P. Hayes, Swinburne Univ. of Technology (Australia)
Michael W. Austin, RMIT Univ. (Australia)


© SPIE. Terms of Use
Back to Top