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Journal of Micro/Nanolithography, MEMS, and MOEMS

KrF excimer laser trenching of X-cut LiNbO3 for realization of optimized optical modulator electrode structures
Author(s): Han-Woo Chong; Arnan Mitchell; Jason P. Hayes; Michael W. Austin
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Paper Abstract

An investigation of the micromachining of trenches in lithium niobate (LiNbO3) using direct imaged 248 nm KrF excimer laser ablation is presented. Trenches 20 μm wide and 0.5-7.5 μm deep have been produced. These trenches are assessed and are deemed suitable for the machining of integrated electro-optic structures. Based on the characterized ablation conditions, trenches of high quality have been successfully fabricated on an X-cut optical modulator which is potentially important for the realization of efficient broadband optical intensity modulators.

Paper Details

Date Published: 1 July 2002
PDF: 6 pages
J. Micro/Nanolith. MEMS MOEMS 1(2) doi: 10.1117/1.1484160
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 1, Issue 2
Show Author Affiliations
Han-Woo Chong, RMIT Univ. (Australia)
Arnan Mitchell, RMIT Univ. (Australia)
Jason P. Hayes, Swinburne Univ. of Technology (Australia)
Michael W. Austin, RMIT Univ. (Australia)

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