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Optical Engineering

Non-oxidized Al-overcoated Ir bilayers with high reflectance in the extreme ultraviolet above 50 nm
Author(s): Juan I. Larruquert; Jose Antonio Mendez; Jose Antonio Aznarez
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Paper Abstract

Bilayers of a thin, nonoxidized Al film over an Ir film are prepared. The bilayers are intended to enhance the reflectance of Al below the Al plasma wavelength (?p~83 nm). Above ?p the bilayers have a high reflectance comparable to that of single Al films. Ir films were deposited by electron gun evaporation on a heated substrate. Al films of various thicknesses are deposited by evaporation from a thermal source on the Ir film once it is cooled to room temperature. The bilayers are prepared under ultra-high-vacuum (UHV) conditions and their reflectance is measured in situ. Accelerated aging processes, which are performed by annealing the bilayers in UHV, show that the bilayers are stable after 1 h annealing at temperatures up to 540±625 K. The bilayers show no observable deterioration after long-term storage under normal atmosphere. The optical constants of Ir films are also obtained. In-orbit coating of optical surfaces with Ir/Al bilayers is proposed for extreme UV astronomy.

Paper Details

Date Published: 1 June 2002
PDF: 7 pages
Opt. Eng. 41(6) doi: 10.1117/1.1477438
Published in: Optical Engineering Volume 41, Issue 6
Show Author Affiliations
Juan I. Larruquert, CSIC Instituto de Fisica Aplicada (Spain)
Jose Antonio Mendez, CSIC Instituto de Fisica Aplicada (Spain)
Jose Antonio Aznarez, CSIC Instituto de Fisica Aplicada (Spain)

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