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Optical Engineering

Design and implementation of a 3-D mapping system for highly irregular shaped objects with application to semiconductor manufacturing
Author(s): Vivek A. Sujan; Steven Dubowsky
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Paper Details

Date Published: 1 June 2002
PDF: 12 pages
Opt. Eng. 41(6) doi: 10.1117/1.1474438
Published in: Optical Engineering Volume 41, Issue 6
Show Author Affiliations
Vivek A. Sujan, Massachusetts Institute of Technology (United States)
Steven Dubowsky, Massachusetts Institute of Technology (United States)


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