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Journal of Micro/Nanolithography, MEMS, and MOEMS

Organic micromachining techniques for mass production of millimeter-wave and submillimeter-wave planar circuits
Author(s): Wai Yip Liu; David Paul Steenson; Michael B. Steer
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Paper Abstract

In this paper we present a range of organic micromachining techniques that enable a planar membrane-based printed circuit to be fabricated on a 5 μm thick organic membrane in the absence of any steps involving thermal oxidation and low pressure chemical vapor deposition. The technologies are suitable for mass production of millimeter-wave or submillimeter-wave components. Transmission losses of a membrane-supported E-plane component are typically less than 0.5 dB/cm.

Paper Details

Date Published: 1 July 2002
PDF: 4 pages
J. Micro/Nanolith. 1(2) doi: 10.1117/1.1463042
Published in: Journal of Micro/Nanolithography, MEMS, and MOEMS Volume 1, Issue 2
Show Author Affiliations
Wai Yip Liu, Univ. of Leeds (United States)
David Paul Steenson, Univ. of Leeds (United Kingdom)
Michael B. Steer, North Carolina State Univ. (United States)


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